TY  - BOOK
AU  - Namba, S.
ED  - The U.S.-Japan Seminar on Ion Implanation in   Semiconductors
TI  - Ion implanation in semiconductors : proceedings  of the U.S.-Japan seminar
U1  - 537.622 
PY  - 1972///
CY  - Tokyo
PB  - Japan Society for the Promotion of Science
N1  - SR
ER  -